Nanofabrication Facility |
| Woollam Spectroscopic Ellipsometer |
| CNS ID: ES-1 |
| Make: J.A. Woollam |
| Model: WVASE32 |
| Category: Metrology |
| Name: Woollam Spectroscopic Ellipsometer |
| Location: LISE - Cleanroom G07 |
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More Info:
Equipment description and usage:
Woollam V-VASE32 vertical angle spectroscopic ellipsomer is used for non-invasive characterizing of multilayer film thickness, optical constants, film composition, crystallinity, surface and interface roughness, anisotropy, birefringence, bandgap and electronic transitions. The spectral range of system covers from 193 to 1700 nm. Incident angle can be automatically adjusted from 20� - 70�. The system also equipped with Auto-Retarder for high accuracy and depolarization, anisotropy, or Mueller-Matrix measurement.
Applications:
This is system is currently configured for general purpose.
Features:
* Spectral range: 193 � 1700 nm
* Angle of incidence: 20� - 70�, automatic
* Double monochromator for superior stray-light rejection
* AutoRetarder for high accuracy measurement and depolarization, anisotropy, or Mueller-Matrix
* Up to 200 mm diameter samples |
Comments:
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| Contact Info: |
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdeng cns.fas.harvard.edu |
Jason Tresback
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-496-1783
jtresbackcns.fas.harvard.edu |
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