Nanofabrication Facility |
| Technics Plasma Stripper/Cleaner |
| CNS ID: RIE-5 |
| Make: Technics |
| Model: 220 |
| Category: Dry Process |
| Name: Technics Plasma Stripper/Cleaner |
| Location: LISE - Cleanroom G07 |
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More Info:
The Technics is a rf plasma reactor and equipped with stainless steel reactor, 500 watt, 13.56 MHz RF generator, and two gas supplies, O2 and CF4. With a stainless steel plate and a wafer boat, the Technics is able to process any size of samples that are smaller than 6� in diameter. When used with the optional Faraday Cage, the substrates are totally protected from ionic bombardment. |
Comments:
Applications
Photoresist stripping, surface cleaning, and O2 plasma surface treatment on Si or other substrates such as GaAs, ceramic, metal, plastic, and glass. |
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| Contact Info: |
Ling Xie
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-496-9069
lxie cns.fas.harvard.edu |
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdengcns.fas.harvard.edu |
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