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Nanofabrication Facility
 Technics Plasma Stripper/Cleaner
CNS ID: RIE-5
MakeTechnics
Model220
CategoryDry Process
NameTechnics Plasma Stripper/Cleaner
LocationLISE - Cleanroom G07
 
 
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More Info
The Technics is a rf plasma reactor and equipped with stainless steel reactor, 500 watt, 13.56 MHz RF generator, and two gas supplies, O2 and CF4. With a stainless steel plate and a wafer boat, the Technics is able to process any size of samples that are smaller than 6� in diameter. When used with the optional Faraday Cage, the substrates are totally protected from ionic bombardment.
Comments
Applications Photoresist stripping, surface cleaning, and O2 plasma surface treatment on Si or other substrates such as GaAs, ceramic, metal, plastic, and glass.
 
Contact Info:
Ling Xie
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-496-9069
lxiecns.fas.harvard.edu
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdengcns.fas.harvard.edu
 
 

10/06/14
New RIE-11 Plasma-Therm VersaLine Diamond RIE Going Online! Trainings to be announced soon!