Nanofabrication Facility |
| Sharon Thermal Evaporator TE-5 |
| CNS ID: TE-5 |
| Make: Sharon |
| Model: N/A |
| Category: Physical Vapor Deposition |
| Name: Sharon Thermal Evaporator TE-5 |
| Location: LISE - Cleanroom G07 |
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More Info:
Equipment description and usage:
SHARON TE-5 is a three-source thermal evaporation system for depositing thin films by resistive heating. The three thermal sources are controlled by a 2.5-kW power supply, suitable for sequential deposition. Film thickness is monitored in-situ by a quartz crystal monitor. The base pressure of system can reach 10E-7 torr range pumped by cryo and oil-free roughing pumps. This system is a rapid turn-around machine with a typical pump down time of ~60 minutes and evaporation times of several minutes, dependant on material. This system is currently set up for general metal deposition (Ti, Cr, Ni, Pd, Pt, Ag, Au, Al, Ge). If you wish to become a qualified user for this system, you must contact Ed Macomber (eddiemac@cns.fas.harvard.edu) or JD Deng (jdeng@cns.fas.harvard.edu) for training and qualification. |
Comments:
General metals, contacts |
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| Contact Info: |
Ed Macomber
LISE G44
11 Oxford Street
Cambridge, MA 02138
617-384-5227
eddiemac cns.fas.harvard.edu |
Jason Tresback
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-496-1783
jtresbackcns.fas.harvard.edu |
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