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Nanofabrication Facility
 Sharon Thermal Evaporator TE-3
CNS ID: TE-3
MakeSharon
ModelN/A
CategoryPhysical Vapor Deposition
NameSharon Thermal Evaporator TE-3
LocationLISE - Cleanroom G07
 
 
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More Info
SHARON TE-3 is a four-source thermal evaporation system with one 2.5-kW power supply for sequential resistive-heated deposition. Film thickness is monitored in-situ by a quartz crystal monitor. A cryopump, backed by an oil-free roughing pump, enables base pressures down to the 10E-7 torr range. This system is a rapid turn-around machine with a typical pump down time of ~1 hour and evaporation times of several minutes. This system is currently set up for metal deposition, in particular for metal contacts. Cr, Au, Ti, Pt, Pd, Cu, Ag, and Al are the metals allowed in the system. If you wish to become a qualified user for this evaporator, you must contact Ed Macomber (eddiemac@cns.fas.harvard.edu) or JD Deng (jdeng@cns.fas.harvard.edu) for training and qualification.
Comments
This system is currently set up for metal deposition, in particular for metal contacts. Cr, Au, Ti, Pt, Pd, Cu, Ag, and Al are the metals allowed in the system.
 
Contact Info:
Ed Macomber
LISE G44
11 Oxford Street
Cambridge, MA 02138
617-384-5227
eddiemaccns.fas.harvard.edu
Jason Tresback
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-496-1783
jtresbackcns.fas.harvard.edu
 
 

10/06/14
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