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Imaging and Analysis
 LEO A FESEM
CNS ID: HAR-002
MakeZeiss
Model982
CategoryScanning Electron Microscopy (SEM)
NameLEO A FESEM
LocationLISE - Cleanroom G07
 
 
Click on a thumbnail to enlarge. For multiple images: after a picture has enlarged, you can move between photos by clicking on the right/left edges of the enlarged image.
More Info
Equipment description and usage:

The LEO Scanning Electron Microscope (SEM) allows surface examination down to nanometer scales. The SEM uses a low to moderate energy (0.2 to 30 keV) electron beam to image a sample in high vacuum with resolutions down to 1 nanometer at 30 keV.

Imaging:

* Resolution: 1 nm at 30 kV and 4 nm at 1 kV (specified)
* Selectable beam energy: 200 eV to 30 keV
* Digital imaging and system control
* Images stored to removable Zip disks

Comments
Please note that this tool is in the LISE Cleanroom (G07). In order to qualify to use this tool, you must be a fully qualified CNS LISE Cleanroom User. Please see the Nanofabrication Facility Use page in the User Info section for information on how to qualify as a LISE Cleanroom User.
 
Contact Info:
Dave Lange
LISE B50
11 Oxford Street
Cambridge, MA 02138
617-495-2375
langecns.fas.harvard.edu
Fettah Kosar
LISE G48
11 Oxford St.
Cambridge, MA 02138
617-495-1738
fkosarcns.fas.harvard.edu
 
 

10/06/14
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