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More Info:
The Ultra Plus Field Emission Scanning Electron Microscope (FESEM) allows surface examination down to nanometer scales. The FESEM uses a low to moderate energy (0.1 to 30 keV) electron beam to image the surface of a sample in high vacuum with edge resolutions down to 1 nanometer at 15 keV and 1.7 nm at 1 keV.
Comments:
Detectors available: Inlens SE, Everhart-Thornley SE-BSE, EsB (inlens Energy selective Backscattered electron detector), and STEM (Scanning Transmission Electron detector). The Ultra Plus has a 80 mm airlock for sample exchange. The Ultra Plus also has a Charge Compensation (CC) system which places a gas needle close to the sample for localized gas (N2) injection to reduce charging. This CC system reduces the skirt effects observed in traditional variable pressure systems and the normal SE detectors (Inlens and Everhart-Thornley) can be used.
Contact Info:
Dave Lange
LISE B50
11 Oxford Street
Cambridge, MA 02138
617-495-2375
langecns.fas.harvard.edu
David Bell
LISE B56
11 Oxford Street
Cambridge, MA 02138
617-496-6794
dcbcns.fas.harvard.edu
cns.fas.harvard.edu
