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Material Synthesis Facility
 Plasma Prep II
CNS ID: SLF-2
Make: STRUCTURE PROBES
Model: Plasma Prep II 11005
Category: Chemical Nanotechnology
Name: Plasma Prep II
Location: LISE - G06
 
 
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More Info: 
Surface treatment or surface cleaning tool using oxygen process. Working pressure = 250 mTorr.
Comments: 
Mainly used for PDMS bonding.
 
Contact Info:
Hao-Yu (Greg) Lin
LISE G40
11 Oxford Street
Cambridge, MA 02138
617-384-5028
hlincns.fas.harvard.edu
 
 

05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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