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Nanofabrication Facility
 Veeco Dektak Profilometer
CNS ID: PL-5
MakeVeeco
ModelDektak 6M
CategoryMetrology
NameVeeco Dektak Profilometer
LocationLISE - Cleanroom G07
 
 
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More Info
Dektak 6M profilometer measures the surface topography electromechanically by moving a sample beneath a diamond-tipped stylus. As the sample stage moves, the stylus scans over the surface of the sample. The vertical movements of the stylus is measured and recorded simultaneously during the scanning, which reveals the topographical structure of the surface.

The instrument has vertical resolution in nanometers and horizontal resolution as small as twenty nanometers. Programmable stylus force and scan speed allow measurements on variety of substrate materials.


Applications:

Dektak 6M can be used to profile surface topography and waviness, as well as measuring surface roughness in the nanometer range.

Features:

* Computer controlled measurement
* Nanometers vertical resolution
* Mechanical and optical components for sample placement, viewing and scanning
* Styluses with different sizes permit measurement in a wide range of applications
* A color, high-resolution video camera for color video of a 2.6x2.6 mm area
* Convenient X-Y positioning
Comments
in Metrology Bay
 
Contact Info:
Jason Tresback
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-496-1783
jtresbackcns.fas.harvard.edu
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdengcns.fas.harvard.edu
 
 

07/23/13
New DRIE on-line and available for Training !!

 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.

 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.

 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo

 

DRIE system on site - available soon.

 

01/18/13
i-line stepper coming to CNS this spring!

 

08/14/12
We bought the k-alpha XPS - it will be staying!

 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!

 

10/04/12
XeF2 etch system now available!

 

02/21/12
Time Resolved PL Spectroscopy now available