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More Info:
The Anatech 106 oxygen plasma barrel asher is a useful tool for quickly removing thin layers of organic contamination. It is useful as a final clean after a wet-chemical photoresist removal, or as a “de-scum” process before a deposition process. The tool can accommodate up to 150 mm diameter substrates. The tool is nearly completely automated, with a touch-screen control panel. Maximum RF power is 300 watts, maximum O2 flow rate of 100 SCCM.
Comments:
Training is offered most weeks, in conjunction with training on the technics plasma system. Sign up is on the online training webpage.
Contact Info:
Ling Xie
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-496-9069
lxiecns.fas.harvard.edu
Steven Hickman
LISE G38
11 Oxford Street
Cambridge, MA 02138
617-384-5024
shickmancns.fas.harvard.edu
cns.fas.harvard.edu
