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Nanofabrication Facility
 Tystar Bank2 Wet/Dry Oxidation
CNS ID: CVD-10
MakeTystar
ModelMini Tytan 4600
CategoryFurnaces
NameTystar Bank2 Wet/Dry Oxidation
LocationLISE - Cleanroom G07
 
 
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More Info
This furnace is for Thermal Oxidation and is an atmospheric furnace with an eighteen inch flat zone capable of processing wafers up to 6 inch diameter, as well as smaller samples as well. it also is equipped with an external Hydrogen torch for pyrogenic wet oxidation. There is also oxygen available for Dry oxidation and Nitrogen for anneals.
Comments
Uniformity is 1.5% over 6" Index of Refraction is 1.45-1.47 rate is 7nm/min for Wet rate is 2.5nm/min for dry
 
Contact Info:
Philippe de Rouffignac
LISE G38
11 Oxford Street
Cambridge, MA 02138
617-384-5695
philippecns.fas.harvard.edu
John Tsakirgis
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-384-9651
jtsakirgcns.fas.harvard.edu
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdengcns.fas.harvard.edu
 
 

10/06/14
New RIE-11 Plasma-Therm VersaLine Diamond RIE Going Online! Trainings to be announced soon!