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Nanofabrication Facility
 Tystar Bank2 Metal Anneal
CNS ID: CVD-9
Make: Tystar
Model: Mini Tytan 4600
Category: Furnaces
Name: Tystar Bank2 Metal Anneal
Location: LISE - Cleanroom G07
 
 
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More Info: 
The metal anneal furnace is an atmospheric furnace with 18" flat zone and capable of processing up to 6" wafers. the furnace provides N2 and H2forming gas mixture for inert ambient processing.
Comments: 
Maximum temperature is 1100'C
 
Contact Info:
John Tsakirgis
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-384-9651
jtsakirgcns.fas.harvard.edu
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdengcns.fas.harvard.edu
 
 

05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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