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Nanofabrication Facility
 Electron Beam Resist Developing Station
CNS ID: SB-06
MakeReynolds Tech
ModelFWS 72SS
CategoryWet Benches
NameElectron Beam Resist Developing Station
LocationLISE - Cleanroom G07
 
 
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More Info
SB-06 is a Reynolds Tech general purpose work station for electron beam resist developing located in the E-Beam Lithography Bay of the Center for Nanoscale Systems cleanroom. An ergonomic, anti-static, chemical spill mat is located in front of SB-7. The bench features a VWR shaker plate, a VWR stirring plate, gooseneck sinks, DI spray guns, N2 drying guns and solvent disposal drains. The touch screen interface displays warnings, alarms and error codes. Solvents are stocked beneath this bench for general use.
Comments
For a complete list of chemicals, required personal protective equipment and materials restrictions associated with this wet station, please contact Yuan Lu for more information. For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site www.cns.fas.harvard.edu/users/training_events.php
 
Contact Info:
Amehayesus Gebreyohannes
LISE G50
11 Oxford Street
Cambridge, MA 02138

amehacns.fas.harvard.edu
Yuan Lu
LISE G42
11 Oxford Street
Cambridge, MA 02138
617-495-2822
ylufas.harvard.edu
Mac Hathaway
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-495-9012
hathawaycns.fas.harvard.edu
 
 

07/23/13
New DRIE on-line and available for Training !!

 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.

 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.

 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo

 

DRIE system on site - available soon.

 

01/18/13
i-line stepper coming to CNS this spring!

 

08/14/12
We bought the k-alpha XPS - it will be staying!

 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!

 

10/04/12
XeF2 etch system now available!

 

02/21/12
Time Resolved PL Spectroscopy now available