Nanofabrication Facility |
| Electron Beam Resist Spin Coating Station |
| CNS ID: SB-07 |
| Make: Reynolds Tech |
| Model: FWS 72SS |
| Category: Wet Benches |
| Name: Electron Beam Resist Spin Coating Station |
| Location: LISE - Cleanroom G07 |
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More Info:
SB-07 is a Reynolds Tech general purpose work station for electron beam resist spin coating located in the e-beam Lithography Bay of the Center for Nanoscale Systems cleanroom. An ergonomic, anti-static, chemical spill mat is located in front of SB-6. The bench features two Headway Research spin coaters/controllers, various spinner chuck sizes for pieces through 6"/150mm wafers, two Torrey Pines hot plates, N2 drying guns and a photoresist/solvent disposal drains. The touch screen interface displays warnings, alarms and error codes. Photoresists are stocked beneath this bench for general use. |
Comments:
For a complete list of chemicals, required personal protective equipment and materials restrictions associated with this wet station, please contact Yuan Lu for more information. For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site www.cns.fas.harvard.edu/users/training_events.php
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| Contact Info: |
Yuan Lu
LISE G42
11 Oxford Street
Cambridge, MA 02138
617-495-2822
ylu fas.harvard.edu |
Mac Hathaway
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-495-9012
hathawaycns.fas.harvard.edu |
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