Nanofabrication Facility |
| SU-8 Spin Coating Station |
| CNS ID: SB-05 |
| Make: Reynolds Tech |
| Model: FWS 72SS |
| Category: Wet Benches |
| Name: SU-8 Spin Coating Station |
| Location: LISE - Cleanroom G07 |
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More Info:
SB-5 is a Reynolds Tech general purpose work station for photodefinable epoxy spin coating located in the Photolithography Bay of the Center for Nanoscale Systems cleanroom. An ergonomic, anti-static, chemical spill mat is located in front of SB-5. The bench features two Headway Research spin coaters/controllers, various spinner chuck sizes for pieces through 6"/150mm wafers, two Torrey Pines hot plates, N2 drying guns and a photoresist/solvent disposal drains. The touch screen interface displays warnings, alarms and error codes. Photoresists are stocked beneath this bench for general use. |
Comments:
For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site www.cns.fas.harvard.edu/users/training_events.php
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| Contact Info: |
Steven Hickman
LISE G38
11 Oxford Street
Cambridge, MA 02138
617-384-5024
shickman cns.fas.harvard.edu |
Mac Hathaway
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-495-9012
hathawaycns.fas.harvard.edu |
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