About the Center for Nanoscale Systems (CNS) at Harvard University- Overview - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- What are Nanoscale Systems? - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- Origins of CNS - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- Mission and Goals - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- CNS Management - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- Visitor’s Info - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- Administrative Office - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- Links - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- News and Events - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. About the Center for Nanoscale Systems (CNS) at Harvard University- CNS NanoWire - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - Overview - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - How do I become a CNS/NNIN user? - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - Acknowledgement - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - Nanofabrication Facility Use - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - Imaging Facility Use - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - NanoMaterials Facility Use - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - Forms - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - CNS User Fees - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - General User Information and Policy - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN users - Training Sign-up - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN - Overview - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN - Social and Ethical Issues in Nanotechnology - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - Overview - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - CNS Associated Faculty - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - CNS/NNIN REU Research - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - Research Experience for Teachers (RET) - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - CNS Educational Activities - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - CNS Videos - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - Slides and Presentations - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - CNS Publications - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - User Stats - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - CNS in the News - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems. CNS/NNIN Research - Scientific News from the World - Harvard Nanoscale, Nanotechnology, HU, fabrication and construction of nanoscale systems.
   
 
CNS Facilities
» Overview
» Nanofabrication Facility
» Imaging and Analysis
» NanoMaterials Facility
» Facility Development
» Administration
» Search Tools
   
   
   
   
Nanofabrication Facility
 RCA Clean Wet Process Station
CNS ID: AB-2
MakeReynolds Tech
ModelFWS 72CPVC
CategoryWet Benches
NameRCA Clean Wet Process Station
LocationLISE - Cleanroom G07
 
 
Click on a thumbnail to enlarge. For multiple images: after a picture has enlarged, you can move between photos by clicking on the right/left edges of the enlarged image.
More Info
AB-2 is a Reynolds Tech RCA clean wet process station located in the Wet Process Bay of the Center for Nanoscale Systems cleanroom. All water supplied to this bench is 18 Mohm deionized water. An ergonomic, anti-static, chemical spill mat is located in front of AB-2. The bench features a 70C SC-1 bath, a 70C SC-2 bath and 25C DHF bath; each bath has an associated dump rinser and a there is a global plenum rinse. Bench top processing is permitted at this bench when the RCA clean tanks are not in use. There is a gooseneck sink, DI spray guns, aspirator and N2 drying guns. The touch screen interface allows for user control of dump rinser and aspirator timers, as well as displaying warnings, alarms and error codes. Acids and bases are stocked beneath this bench for general use.
Comments
For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site www.cns.fas.harvard.edu/users/training_events.php
 
Contact Info:
Mac Hathaway
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-495-9012
hathawaycns.fas.harvard.edu
John Tsakirgis
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-384-9651
jtsakirgcns.fas.harvard.edu
 
 

10/06/14
New RIE-11 Plasma-Therm VersaLine Diamond RIE Going Online! Trainings to be announced soon!