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Nanofabrication Facility
 Lindberg Furnace
CNS ID: CVD-4
Make: Thermo Electron Corporation
Model: Lindberg/Blue M
Category: Furnaces
Name: Lindberg Furnace
Location: LISE - G27
 
 
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More Info: 
furnace is a general purpose atmospheric annealing system. Its operating temperature range is 200-1100C in atmosphere, N2, O2 or 5% forming gas (H2/N2) ambients. The quartz furnace tube diameter is 6"/150mm and can handle substrates from pieces through 4"/100mm. Substrates are loaded and unloaded in a quartz boat.
Comments: 
 
Contact Info:
Steve Paolini
LISE G50
11 Oxford Street
Cambridge, MA 02138
617-496-9816
spaolinicns.fas.harvard.edu
John Tsakirgis
LISE G52
11 Oxford Street
Cambridge, MA 02138
617-384-9651
jtsakirgcns.fas.harvard.edu
 
 

05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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