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Nanofabrication Facility
 CDE ResMap-178
CNS ID: MET-2
Make: CDE Inc.
Model: ResMap 178
Category: Metrology
Name: CDE ResMap-178
Location: LISE - Cleanroom G07
 
 
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More Info: 
CDE 4 point probe (4pp) ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). As a commonly used metrology unit in nanofabrication processes to characterize the thin film electrical properties, the tool’s capabilities include:
1) Sample size: 10mm to 150mm in diameter
2) Measurement range, 5mΩ to 5 MΩ
3) Accuracy: within 1%
4) Software: easy to use, mapping capability (2D and 3D contour)
5) Fast measurement and easy operation
Comments: 
 
Contact Info:
Jason Tresback
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-496-1783
jtresbackcns.fas.harvard.edu
 
 

05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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