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NanoMaterials Facility
 Soft Lithography Foundry
CNS ID: MSN-G06A
MakeVarious
ModelVarious
CategoryChemical Nanotechnology
NameSoft Lithography Foundry
LocationLISE - G06
 
 
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More Info
The new foundry in LISE G06 provides amenities such as two state-of-the-art wet benches (one for solvents and the other for acids and bases), a laminar flow hood to conduct “semi-clean” work, generous bench-top work areas with various tools and supplies, a convection oven and hotplates for curing polydimethylsiloxane (PDMS), an automated mixer/degasser, vacuum and silanization chambers, a contact stylus-type surface profiler, and two brand-new Nikon microscopes. The access to all these instruments and tools are offered to our users for a fixed daily charge (see User Fees page in the User Info section of this web site), which also includes Sylgard 184 PDMS and all supplies. In addition, we have a new laser cutting system for fabricating microfluidic devices from plastic laminates. For more information on the individual tools, please consult with their specific tool descriptions.
Comments
The Soft Lithography Foundry is located in the ground floor of the Laboratory for Integrated Science and Engineering (LISE) building.
 
Contact Info:
Fettah Kosar
LISE G48
11 Oxford St.
Cambridge, MA 02138
617-495-1738
fkosarcns.fas.harvard.edu
 
 

10/06/14
New RIE-11 Plasma-Therm VersaLine Diamond RIE Going Online! Trainings to be announced soon!