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Imaging and Analysis
 FESEM Ultra55
CNS ID: SEM-4
MakeZeiss
ModelUltra55
CategoryScanning Electron Microscopy (SEM)
NameFESEM Ultra55
LocationLISE - B15I
 
 
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More Info
Detectors available: In-lens SE, Everhart-Thornley SE, EsB (Energy selective Backscattered electron detector), AsB (Angle selective Backscattered electron detector), and STEM (Scanning Transmission Electron detector). EDS detector
Comments
The Ultra55 Field Emission Scanning Electron Microscope (FESEM) allows surface examination down to nanometer scales. The SEM uses a low to moderate energy (0.1 to 30 keV) electron beam to image a sample in high vacuum with resolutions down to 1 nanometer at 15 keV and 1.7 nm at 1 keV.
 
Contact Info:
Dave Lange
LISE B50
11 Oxford Street
Cambridge, MA 02138
617-495-2375
langecns.fas.harvard.edu
David Bell
LISE B56
11 Oxford Street
Cambridge, MA 02138
617-496-6794
dcbcns.fas.harvard.edu
 
 

07/23/13
New DRIE on-line and available for Training !!

 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.

 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.

 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo

 

DRIE system on site - available soon.

 

01/18/13
i-line stepper coming to CNS this spring!

 

08/14/12
We bought the k-alpha XPS - it will be staying!

 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!

 

10/04/12
XeF2 etch system now available!

 

02/21/12
Time Resolved PL Spectroscopy now available