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Imaging and Analysis
 FESEM Ultra55
CNS ID: SEM-4
Make: Zeiss
Model: Ultra55
Category: Scanning Electron Microscopy (SEM)
Name: FESEM Ultra55
Location: LISE - B15I
 
 
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More Info: 
Detectors available: In-lens SE, Everhart-Thornley SE, EsB (Energy selective Backscattered electron detector), AsB (Angle selective Backscattered electron detector), and STEM (Scanning Transmission Electron detector). EDS detector
Comments: 
The Ultra55 Field Emission Scanning Electron Microscope (FESEM) allows surface examination down to nanometer scales. The SEM uses a low to moderate energy (0.1 to 30 keV) electron beam to image a sample in high vacuum with resolutions down to 1 nanometer at 15 keV and 1.7 nm at 1 keV.
 
Contact Info:
Dave Lange
LISE B50
11 Oxford Street
Cambridge, MA 02138
617-495-2375
langecns.fas.harvard.edu
David Bell
LISE B56
11 Oxford Street
Cambridge, MA 02138
617-496-6794
dcbcns.fas.harvard.edu
 
 

05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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