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Nanofabrication Facility
 LSD-100 Scriber/Cleaver
CNS ID: SW-2
MakeLoomis
ModelLSD-100
CategoryBack-End and Characterization
NameLSD-100 Scriber/Cleaver
LocationLISE - G12
 
 
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More Info
LSD-100 is an ideal tool for scribing/cleaving III-V compounds. It is also able to scribe/break Si, glass, and even sapphire wafers up to 4" in diameter. Three scribing modes are provided in this machine, including scribing, notching, and pecking, for different applications where the clean and precise scribing/cleaving is required. The machine is driven by a computer system incorporating advanced positioning technologies, a real-time imaging system, and pattern recognition, which makes the scribing process more reliable, more precise and easily repeatable.
Comments
 
Contact Info:
Guixiong Zhong
LISE G42
11 Oxford Street
Cambridge, MA 02138
617-384-5672
gzhongcns.fas.harvard.edu
Steve Paolini
LISE G50
11 Oxford Street
Cambridge, MA 02138
617-496-9816
spaolinicns.fas.harvard.edu
Jiangdong Deng
LISE G54
11 Oxford Street
Cambridge, MA 02138
617-495-3396
jdengcns.fas.harvard.edu
 
 

07/23/13
New DRIE on-line and available for Training !!

 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.

 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.

 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo

 

DRIE system on site - available soon.

 

01/18/13
i-line stepper coming to CNS this spring!

 

08/14/12
We bought the k-alpha XPS - it will be staying!

 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!

 

10/04/12
XeF2 etch system now available!

 

02/21/12
Time Resolved PL Spectroscopy now available