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Material Synthesis Facility
 Plasma Barrel Etcher
CNS ID: RIE-3
Make: Anatech LTD
Model: SP100
Category: Soft Materials Cleanroom
Name: Plasma Barrel Etcher
Location: LISE - Soft Materials Cleanroom G07
 
 
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More Info: 
Contact Ilke Akartuna akartuna@seas.harvard.edu for training information
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05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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